Structural design and active disturbance rejection control of rigid-flexible coupling motion stage for nanopositioning
Release time:2025-03-14
Hits:
- Affiliation of Author(s):
- 数学与统计学院
- Journal:
- IEEE 11th Data Driven Control and Learning Systems Conference
- Co-author:
- Yinsuo Wu,白文艳,Zhi-Liang Zhao
- Correspondence Author:
- Sen Chen
- Volume:
- 0
- Page Number:
- 513-518
- Translation or Not:
- no
- Date of Publication:
- 2022-08-06