Structural design and active disturbance rejection control of rigid-flexible coupling motion stage for nanopositioning
Release time:2023-12-29
Hits:
- Journal:
- Journal of the Franklin Institute
- Funded by:
- 国家自然科学基金项目
- Co-author:
- Ruirui Huang,Liyun Su,Ruiqi Li
- Correspondence Author:
- Sen Chen
- Volume:
- 360
- Page Number:
- 2133-2158
- ISSN No.:
- 0016-0032
- Translation or Not:
- no
- CN No.:
- 广东工业大学，陕西师范大学
- Date of Publication:
- 2023-01-10